产生 EUV 辐射 | TRUMPF
制造芯片时通快高功率激光放大器发挥关键作用：因为借助它可生成发光等离子体，从而提供极紫外光 (euv) 曝光晶圆。 通快与全球最大的光刻系统制造商 ASML 以及镜头制造商蔡司紧密协作，研制出独一无二的 CO 2 激光系统，它每秒可加工 100 多个晶圆。
Generation of EUV radiation | TRUMPF
High-performance laser amplifiers by TRUMPF play a central role in the production of these chips. They help to create a luminous plasma which delivers extreme ultraviolet radiation (EUV) exposure to the substrate.
EUV Drive Laser | TRUMPF
ASML, Zeiss, and TRUMPF joined forces to develop a technology to produce extreme ultraviolet (EUV) light with a wavelength of 13.5 nanometers for industrial use: In a vacuum chamber, a droplet generator shoots 50,000 tiny tin droplets per second.
ASML EUV光刻机关键部件供应商TRUMPF落户深圳！ - 腾讯网
2023年5月26日 · 据“滨海宝安”消息，5月24日，全球高端装备领域领先企业、全球光刻机巨头ASML的极紫外（EUV）光刻机的“drive laser”唯一供应商——德国通快集团（TRUMPF）宣布其在深圳的分公司成功开幕。 通快深圳分公司开幕仪式在宝安中德（欧）产业示范园举行。 据介绍，通快集团早在2021年11月的第四届中国国际进口博览会期间，就已经与宝安区投资管理集团有限公司签约，宣布在宝安中德（欧）产业示范园投资建设“通快大湾区激光应用研发中心项目”。 …
EUV 驱动激光 | TRUMPF
euv 光刻是未来微芯片的制造方法。用于等离子体辐射的激光脉冲来自通快激光放大器。
TRUMPF EUV lithography – This all happens in one second
2019年2月6日 · With EUV lithography, TRUMPF, in partnership with ASML and Zeiss, has developed a cost-efficient and mass-suitable process, during which the wafers are exposed to extreme ultraviolet (EUV)...
Trumpf consolidates EUV lithography supply chain with Access
2017年10月4日 · Trumpf says it has acquired a majority stake in US-based Access Laser, explaining that the precision carbon dioxide sources offered by the Seattle company are a critical element in the supply chain for extreme ultraviolet (EUV) lithography equipment.
ZEISS, TRUMPF and Fraunhofer research team awarded the …
2020年11月25日 · Thanks to EUV, over 3,300 high-tech jobs have been created at ZEISS and TRUMPF to date and an annual turnover of more than one billion euros - with an upward trend - was generated in 2019. The Dutch company ASML …
By scaling the repetition rate and simultaneously going to shorter pulses, the pulse energy in the first part each pulse can be kept constant. Further power increase by even higher repetition rate possible and under investigation. Industrialized TRUMPF Amplifier including multi-stage amplification and seed isolation. Thank you for your attention!
The secret of EUV generation - Laser Focus World
2017年8月11日 · While Trumpf has a long record for delivering kW-class CO 2 lasers for cutting and welding they had to re-think their system completely for the EUV generation. Due to a conversion efficiency of a few percent from CO 2 radiation to EUV, the CO 2 source must deliver more than 20 kW.