Samsung opened the door to “10nm-class DRAM” for the first time in the industry after overcoming technical challenges in DRAM scaling. These challenges were mastered using currently available ArF ...
Samsung advanced its DRAM business on several fronts last year. After being first to use extreme ultraviolet (EUV) lithography in March 2020, Samsung started mass production of 14nm EUV-based DRAM in ...
Not so fast. At IEDM, Samsung presented a technology that would enable DRAMs at 20nm and beyond. In fact, Samsung has fabricated a 20nm DRAM without the need for extreme ultraviolet (EUV) lithography.
Micron has finally added advanced EUV lithography to its DRAM production nodes as its newest process node enters pilot production. Unlike its competitors, Micron was in no hurry to use EUV ...