EUV, extreme ultraviolet lithography, is nearly completely associated with the Dutch company ASML, the only maker of EUV ...
Clay Klein has been announced as the 2025 recipient of the $10,000 Nick Cobb Memorial Scholarship by SPIE, the international ...
A typical optical system for lithography contains 11 components, so the total throughput of EUV light is only around ... laser-plasma source and zone-plate optics to focus the radiation.
In contrast to vacuum ultraviolet (VUV) and deep ultraviolet (DUV) light used for current lithography technologies, extreme UV (EUV) light with a wavelength of 13.5 nm is strongly absorbed by any ...
Rapidus has begun installing the EUV system at its chip fabrication facility under construction in Chitose, a city in the northern prefecture of Hokkaido.
There is, however, a limit to frequency conversion using nonlinear optics ... EUV generation in a modified XUUS using only 20 μJ pulses at a repetition rate of 50 kHz from a compact amplifier system.
The system can manage all tasks in the field of photonics and fiber-optic alignment including simultaneous alignment in several degrees of freedom. The use of ultra-low noise electronics ...
Jan. 15, 2025 — Researchers have described the neurodegeneration that occurs in the nervous system of the bowel in Batten disease, a rare and fatal genetic condition. In their latest study ...