ASML’s EUV lithography technology is indispensable to the production of cutting-edge microchips, making it a linchpin of the ...

Extreme Ultraviolet (EUV) lithography is a critical technology for manufacturing semiconductor chips smaller than 7 ...

As US restrictions continue getting tougher, Chinese researchers are coming up with innovative approaches to chip ...

4 have developed a soft-X-ray/EUV microscope in the water window that achieves sub-visible-light resolution. The microscope consists of a laser-plasma source and zone-plate optics to focus the ...

Corning Advanced Optics. "Extreme ULE Glass will expand Corning's vital role in the ongoing pursuit of Moore's Law by helping ...

Compared to the current EUV systems, our innovative extended EUV ... The High-NA scanners not only gave a completely different optics design but also promise to officer significantly faster ...

A research partnership led by Lawrence Livermore National Laboratory (LLNL) has been formed to investigate the next evolution of extreme ultraviolet (EUV) lithography. The team will participate in the ...

Clay Klein has been announced as the 2025 recipient of the $10,000 Nick Cobb Memorial Scholarship by SPIE, the international ...

There is also the question of how to generate EUV light. As mentioned above, the mirrors in the projection optics only reflect 72% of the incident EUV radiation at best. A typical projection lens ...